Suitable for cleanrooms over long distances

In modern semiconductor factories, silicon wafers undergo numerous process steps - from lithography and etching to doping and metallisation. These processes take place in different plants, which are often located far away from each other. Due to the strict requirements for cleanliness and freedom from particles, manual transport within the cleanroom is not feasible. A proven solution is the overhead hoist transport (OHT) - a rail-guided transport system that moves the FOUPs overhead and makes optimum use of cleanroom space. In addition to transport, storage in so-called stockers is also extremely important. These systems place high demands on the energy supply: the cables supplying the OHT units with power and transmitting data must be reliably guided in dynamic and often cramped cleanroom environments - igus now offers an innovative solution for this.

• Abrasion-resistant and ISO-certified by the Fraunhofer IPA
• Reliable on long travels
• Modular and low-maintenance - ideal for use in highly automated cleanroom environments

Abrasion resistance is the decisive parameter for energy chain applications in cleanrooms. The C6 energy chain series sets standards here. Abrasion is barely measurable. It could hardly be better: even under high loads, no abrasion can be measured on the new C6 cleanroom energy chain. Other advantages include extremely quiet running and easy assembly.

Tech up:

• Optimised design without measurable abrasion
• For ISO Cleanroom Class 1 applications
• High stability thanks to robust stop-dog system
• Smooth running due to injection-moulded dampening element
• Side panels made of ESD material prevent static charging